30 August 2026 to 3 September 2026
Europe/Berlin timezone

High Entropy Oxides based on (Zr, Hf, Nb, Ta, Mo, W)Ox: From Powders to Resistively Switching RRAM Devices

1 Sept 2026, 09:31
20m
Brüssel Saal (Eurogress Aachen)

Brüssel Saal

Eurogress Aachen

3. Oral presentation Field assisted sintering technology/Spark Plasma Sintering FAST/SPS Field assisted sintering technology/Spark Plasma Sintering FAST/SPS

Speaker

Christian Pithan (Forschungszentrum Jülich GmbH - Peter Grünberg Institute for Electronic Materials PGI-7)

Description

Tailored densification of high entropy ceramic targets ( 2-inch) by SPS for RF-sputtering of resistively switching thin films of various compositions within the system ZrO2-HfO2-Nb2O5-Ta2O5-MoO6-WO6 are reported along with their microstructural and crystallographic characterization (SEM, HRTEM, XRD …). All single components of the high-order system are CMOS compatible and relevant to resistively switching thin film memristor devices, regarded as promising candidates for next generations of non-volatile memories (RRAM), with high storage density, fast switching kinetics, reduced power consumption, and the capability of in-memory computation. Compositions prepared show a kind of “cocktail effect” in the combinations of the original components: forming free behaviour of WOx, excellent retention of HfOx and high endurance of TaOx. Densification of such targets via natural sintering is challenging, due to the sluggish sintering kinetics generally observed in high entropy systems. Therefore, SPS of powders that were synthesized via (a) solid-state reaction or (b) by chemical precipitation (enhancing homogeneity and reactivity) has been applied. Thin films prepared from the targets were characterized analytically (XPS, AFM, XRD …) and used to fabricate memristor devices (4 m2) showing partially faster switching at lower voltages, with higher Off/On ratio between two resistance states, as well as an excellent cycling endurance of over 108 cycles compared to conventional TaOx-films.

Professional Status of the Speaker Senior Scientist
Invitation letter for visa No
Interest in submitting a paper in a special issue of No interest

Author

Christian Pithan (Forschungszentrum Jülich GmbH - Peter Grünberg Institute for Electronic Materials PGI-7)

Co-authors

Mr Lukas Heinen (Forschungszentrum Jülich GmbH - Peter Grünberg Institute for Electronic Materials PGI-7) Mr Cuo Wu (Dresden University of Technology - Institute of Semiconductor- and Microsystem-Technology, Chair of Nanoelectronics) Dr Jürgen Dornseiffer (Forschungszentrum Jülich GmbH - Institute for Materials and Devices IMD-2) Prof. Martin Bram (Forschungszentrum Jülich GmbH - Institute for Materials and Devices IMD-2) Dr Vikas Rana (Forschungszentrum Jülich GmbH - Peter Grünberg Institute for Electronic Materials PGI-7) Prof. Regina Dittmann (Forschungszentrum Jülich GmbH - Peter Grünberg Institute for Electronic Materials PGI-7)

Presentation materials

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